Polysilicon cleaning




This polysilicon etching unit provides you with best silicon quality with maximum throughput. The system works with low consumption of chemicals and minimize operational costs



Low emission slim rod etching unit with rotating barrel-type product carrier.




Poly silicon recycling unit for broken wafers and small particles or granules, recovers this valuable material down to the fracture of 50µm. The silicon granule is cleaned by acid etching, rinsed , dried and packed.



Treatment of all etching fumes up to 32.000 m³/h incl. special nitride detoxification station.
Polysilicon chunk etching


polysilicon slim rod etching



silicon recycling


polysilicon gas scrubber
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Management Info,
27 Jan 2013, 13:27