Polysilicon Chunk Etching

DECKER‘s flexible automatic rods etching equipment can handle all kinds of silicon rods (Slim rods, feed rods and rods for wafer manufacturing). 

The combined cleaning and etching process allows to produce silicon rods without particles, organic and metal impurities adsorbed on the rod surface.

A combined cleaning and etching tank, together with cascade rinse technique save installation space as well as rinse water.

Please contact us with your specific requirements.
Chunk Etching system