Waste Gas Scrubber


DECKER‘s automatic scrubber system is optimized to clean polluted and hazardous waste gas from DECKER’s silicon etching lines.

Particularly waste gas with NOx, HF and SiF4 –rates can be safely absorbed to a minimum. Furthermore a special nitride detoxification station is included which reduces the nitride load to the waste water treatment.

Please contact us with your specific waste gas treatment requirements.
gas scrubber